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Hybrid plasma source with wireless power transmission system
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2023-06-01T06:39:42Z | - |
| dc.date.available | 2023-06-01T06:39:42Z | - |
| dc.date.issued | 2023-04-26 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/185688 | - |
| dc.title | Hybrid plasma source with wireless power transmission system | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | Plasma Processing and Technology International Conference 2023 | - |
| dc.citation.conferencePlace | Lisbon | - |
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