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Inhibition of tungsten dissolution via coordination complex for high flatness on the surface of the tungsten film during chemical mechanical planarization
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2023-07-05T07:00:39Z | - |
| dc.date.available | 2023-07-05T07:00:39Z | - |
| dc.date.issued | 2022-10-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/187020 | - |
| dc.title | Inhibition of tungsten dissolution via coordination complex for high flatness on the surface of the tungsten film during chemical mechanical planarization | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2022 한국세라믹학회 추계학술대회 | - |
| dc.citation.conferencePlace | 서울 코엑스(COEX) | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)