Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
플라즈마 프로세스
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김호준 | - |
| dc.date.accessioned | 2023-07-24T12:02:45Z | - |
| dc.date.available | 2023-07-24T12:02:45Z | - |
| dc.date.created | 2023-07-08 | - |
| dc.date.issued | 2023-02-08 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/187836 | - |
| dc.publisher | (사)한국진공학회 | - |
| dc.title | 플라즈마 프로세스 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김호준 | - |
| dc.identifier.bibliographicCitation | 제64회 한국진공학회 동계정기학술대회 | - |
| dc.relation.isPartOf | 제64회 한국진공학회 동계정기학술대회 | - |
| dc.citation.title | 제64회 한국진공학회 동계정기학술대회 | - |
| dc.citation.conferencePlace | 웰리힐리파크(강원도 횡성) | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - ETC > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.