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반도체 제조 장비와 전산유체역학
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김호준 | - |
| dc.date.accessioned | 2023-07-24T12:02:56Z | - |
| dc.date.available | 2023-07-24T12:02:56Z | - |
| dc.date.created | 2023-07-08 | - |
| dc.date.issued | 2023-05-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/187838 | - |
| dc.publisher | 한국전산유체공학회 | - |
| dc.title | 반도체 제조 장비와 전산유체역학 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김호준 | - |
| dc.identifier.bibliographicCitation | 2023년도 한국전산유체공학회 춘계학술대회 | - |
| dc.relation.isPartOf | 2023년도 한국전산유체공학회 춘계학술대회 | - |
| dc.citation.title | 2023년도 한국전산유체공학회 춘계학술대회 | - |
| dc.citation.conferencePlace | 웨스틴조선부산호텔 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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