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Effect of dielectric layer on switching characteristics in ferroelectric Zr-doped HfO2 films
- Authors
- 강보수
- Issue Date
- 22-Jun-2023
- Publisher
- 한국전기전자재료학회
- Citation
- 2023 한국전기전자재료학회 하계학술대회
- Conference Name
- 2023 한국전기전자재료학회 하계학술대회
- Place
- 평창 알펜시아 컨벤션센터
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