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Stabilization of Tetragonal Phase of Ti-doped ZrO2 Deposited by ALD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2023-08-16T08:51:44Z | - |
| dc.date.available | 2023-08-16T08:51:44Z | - |
| dc.date.issued | 2023-07-26 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/189375 | - |
| dc.title | Stabilization of Tetragonal Phase of Ti-doped ZrO2 Deposited by ALD | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 23rd International Conference on Atomic Layer Deposition | - |
| dc.citation.conferencePlace | Hyatt Regency Bellevue 900 Bellevue Way NE Bellevue, Washington(USA) | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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