Stabilization of Tetragonal Phase of Ti-doped ZrO2 Deposited by ALD
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2023-08-16T08:51:44Z | - |
dc.date.available | 2023-08-16T08:51:44Z | - |
dc.date.issued | 20230726 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/189375 | - |
dc.title | Stabilization of Tetragonal Phase of Ti-doped ZrO2 Deposited by ALD | - |
dc.type | Conference | - |
dc.citation.conferenceName | 23rd International Conference on Atomic Layer Deposition | - |
dc.citation.conferencePlace | Hyatt Regency Bellevue 900 Bellevue Way NE Bellevue, Washington(USA) | - |
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