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Design and Simulation of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using Multiphysics Fluid Modeling
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ming-Chieh Lin | - |
| dc.date.accessioned | 2023-11-14T09:16:53Z | - |
| dc.date.available | 2023-11-14T09:16:53Z | - |
| dc.date.created | 2023-11-04 | - |
| dc.date.issued | 2023-10-31 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/192586 | - |
| dc.publisher | The American Physical Society (APS) | - |
| dc.title | Design and Simulation of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using Multiphysics Fluid Modeling | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Ming-Chieh Lin | - |
| dc.identifier.bibliographicCitation | The 65th Annual Meeting of the APS Division of Plasma Physics | - |
| dc.relation.isPartOf | The 65th Annual Meeting of the APS Division of Plasma Physics | - |
| dc.citation.title | The 65th Annual Meeting of the APS Division of Plasma Physics | - |
| dc.citation.conferencePlace | Denver, CO, USA | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Lin, Ming Chieh
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)