Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
local ion density control using passive resonant antenna in an inductively coupled plasma with a bias electrode
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2023-11-14T09:25:24Z | - |
| dc.date.available | 2023-11-14T09:25:24Z | - |
| dc.date.created | 2023-10-28 | - |
| dc.date.issued | 2023-10-10 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/192736 | - |
| dc.publisher | American Physical Society | - |
| dc.title | local ion density control using passive resonant antenna in an inductively coupled plasma with a bias electrode | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김주호 | - |
| dc.identifier.bibliographicCitation | 76th Annual Gaseous Electronics Conference | - |
| dc.relation.isPartOf | 76th Annual Gaseous Electronics Conference | - |
| dc.citation.title | 76th Annual Gaseous Electronics Conference | - |
| dc.citation.conferencePlace | Michigan League | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - ETC > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Ju Ho
- COLLEGE OF ENGINEERING (서울 전기·생체공학부)