Plasma Enhanced Atomic Layer Deposition of TiO2 using TDMAT and O2 plasma
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2023-12-12T11:06:14Z | - |
dc.date.available | 2023-12-12T11:06:14Z | - |
dc.date.issued | 20231122 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/193762 | - |
dc.title | Plasma Enhanced Atomic Layer Deposition of TiO2 using TDMAT and O2 plasma | - |
dc.type | Conference | - |
dc.citation.conferenceName | KISM 2023 | - |
dc.citation.conferencePlace | 파라다이스 호텔 부산 | - |
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