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Vertical structured organic-inorganic EUV photoresist fabricated by molecular layer deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 성명모 | - |
| dc.date.accessioned | 2025-01-06T16:00:22Z | - |
| dc.date.available | 2025-01-06T16:00:22Z | - |
| dc.date.issued | 2024-02-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/204698 | - |
| dc.title | Vertical structured organic-inorganic EUV photoresist fabricated by molecular layer deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | SPIE Advanced Lithography + Patterning (AL24) | - |
| dc.citation.conferencePlace | 산호세 | - |
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Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
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Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)