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Chemical composition analysis and optimal deposition CVD Hf-B-C coating by thermodynamic calculation from HfCl4-C3H6-BCl3-Ar-H2
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 신동욱 | - |
| dc.date.accessioned | 2025-01-19T22:00:17Z | - |
| dc.date.available | 2025-01-19T22:00:17Z | - |
| dc.date.issued | 2024-10-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/206245 | - |
| dc.title | Chemical composition analysis and optimal deposition CVD Hf-B-C coating by thermodynamic calculation from HfCl4-C3H6-BCl3-Ar-H2 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2024 Fall meeting 한국세라믹학회 추계학술대회 | - |
| dc.citation.conferencePlace | 서울 코엑스 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- SHIN, DONG WOOK
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)