A Fully Electronic Confocal Microscope Using a Digital Micromirror Device and Electrically Tunable Lens for 3D Measurement

Abstract

With its ability to provide high-resolution, 3D images, the confocal microscope has revolutionized various scientific fields. However, conventional confocal systems often rely on complex mechanical scanning mechanisms, making them less cost-effective, less durable, and limited in speed. We present a 3D confocal microscope that uses a digital micromirror device (DMD) and an electrically tunable lens (ETL) for a fully electronic, high-speed 3D measurement solution. By leveraging the parallel scanning capabilities of DMDs and the precise axial focusing of ETLs, our approach offers significant speed, accuracy, and simplicity advantages. This innovative technology could enable new applications in materials science, biomedical research, and industrial inspection.