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DRAM capacitor용 고유전율 TIO2의 오존 농도에 따른 결정성 변화 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2025-07-18T23:00:19Z | - |
| dc.date.available | 2025-07-18T23:00:19Z | - |
| dc.date.issued | 2024-06-08 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/208286 | - |
| dc.title | DRAM capacitor용 고유전율 TIO2의 오존 농도에 따른 결정성 변화 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | GICM 2024 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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