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Improving Electrical Properties of ALD SnO2 by Engineering Oxygen Vacancy and Al doping method

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dc.contributor.author전형탁-
dc.date.accessioned2025-07-18T23:00:20Z-
dc.date.available2025-07-18T23:00:20Z-
dc.date.issued2025-05-30-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/208291-
dc.titleImproving Electrical Properties of ALD SnO2 by Engineering Oxygen Vacancy and Al doping method-
dc.typeConference-
dc.citation.conferenceName한국반도체디스플레이학회-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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