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Capacitive Micromachined Ultrasonic Transducer without Bias Voltage by using Dielectric Charging Effect

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dc.contributor.author박관규-
dc.date.accessioned2021-08-02T15:35:11Z-
dc.date.available2021-08-02T15:35:11Z-
dc.date.issued2019-04-05-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/20885-
dc.titleCapacitive Micromachined Ultrasonic Transducer without Bias Voltage by using Dielectric Charging Effect-
dc.typeConference-
dc.citation.conferenceName2019, The 21st Korean MEMS Conference-
dc.citation.conferencePlace제주 KAL 호텔-
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)
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