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SCIE
SCOPUS
Distribution-guided heuristic search for nonlinear parameter estimation with an application in semiconductor manufacturing
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Kim, Hyungjin;
Park, Chuljin
; Kang, Yoonshik
Article
Issue Date
2020
Citation
IISE TRANSACTIONS, v.52, no.11, pp.1246 - 1261
Publisher
TAYLOR & FRANCIS INC
1
Discover
Author
Park, Chuljin
1
Kang, Yoonshik
1
Subject
ELECTROMAGNETIC INDUCTION
1
GENETIC ALGORITHM
1
heuristic search
1
inverse problem
1
MODELS
1
Nonlinear parameter estimation
1
optical critical dimension
1
semiconductor manufacturing
1
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1
Date Issued
2020
1
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English
1
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scie
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scopus
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