Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
웨이퍼 보관 시 입자 오염 저감을 위한 구조 개발
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 육세진 | - |
| dc.date.accessioned | 2026-06-23T13:35:58Z | - |
| dc.date.available | 2026-06-23T13:35:58Z | - |
| dc.date.issued | 2026-05-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/214609 | - |
| dc.title | 웨이퍼 보관 시 입자 오염 저감을 위한 구조 개발 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2026 한국기계가공학회 춘계학술발표대회 | - |
| dc.citation.conferencePlace | 창원컨벤션센터 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)