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Stochastic Kriging Assisted Controlled Random Search for Measuring the Optical Critical Dimensions
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박철진 | - |
| dc.date.accessioned | 2026-06-24T15:35:34Z | - |
| dc.date.available | 2026-06-24T15:35:34Z | - |
| dc.date.issued | 2025-07-21 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/215292 | - |
| dc.title | Stochastic Kriging Assisted Controlled Random Search for Measuring the Optical Critical Dimensions | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | INFORMS International Meeting 2025 | - |
| dc.citation.conferencePlace | Singapore | - |
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Collections - 서울 공과대학 > 서울 산업공학과 > 2. Conference Papers
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Related Researcher
- Park, Chuljin
- COLLEGE OF ENGINEERING (DEPARTMENT OF INDUSTRIAL ENGINEERING)