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고종횡비 미세구조의 SU-8 두께에 대한 스핀 코팅 RPM의 영향 분석
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 소홍윤 | - |
| dc.date.accessioned | 2026-06-25T01:30:44Z | - |
| dc.date.available | 2026-06-25T01:30:44Z | - |
| dc.date.issued | 2024-11-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/215873 | - |
| dc.title | 고종횡비 미세구조의 SU-8 두께에 대한 스핀 코팅 RPM의 영향 분석 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2024 대한기계학회 본부학술대회 | - |
| dc.citation.conferencePlace | 제주 국제컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- So, Hong yun
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)