Ultrasonic Manipulation of Particles on Fluid Surface Using 2-D CMUT Array

Abstract

This paper discusses a method to manipulate a particle on a fluid surface using a two-dimensional capacitive micromachined ultrasonic transducer (CMUT) array. For the manipulation of a particle, each CMUT channel should be controlled using an electrical method. The analog switch is used to control the CMUT. The surface of the oil springs up due to the radiation force and a standing wave. This demonstrates that the switches can control the device. A particle moves because of radiation force away from the device. When the two lines of the device operate alternately, the particle moves from side to side. This work demonstrates that micro-size particles can be manipulated on the fluid surface by the array transducers.