Characterization of Sputter-Deposited LiZr2(PO4)(3) Thin Film Solid Electrolyte

Abstract

320-nm-thick LiZr2(PO4)(3) thin film was prepared by radio frequency sputtering and thermally annealed up to 1000 degrees C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800 degrees C was 1.3 x 10(-7) S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 x 10(-6) S/cm above 100 degrees C. It was demonstrated that combined with chemical stability of LiZr2(PO4)(3) and low electronic conductivity, the LiZr2(PO4)(3) thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature. (C) 2015 The Electrochemical Society. All rights reserved.