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Al2O3 thinfilm Atomic Layer Deoposition with UV irradiation
- Authors
- 성명모
- Issue Date
- 11-Jul-2018
- Publisher
- Korea Nano Technology Research Society
- Citation
- NANO KOREA 2018
- Conference Name
- NANO KOREA 2018
- Place
- 킨텍스
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Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
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Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)