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Charging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer

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dc.contributor.author박관규-
dc.date.accessioned2021-08-02T19:35:33Z-
dc.date.available2021-08-02T19:35:33Z-
dc.date.issued2018-07-06-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/27957-
dc.titleCharging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer-
dc.typeConference-
dc.citation.conferenceNameInternational Symposium on Precision Engineering and Sustainable Manufacturing-
dc.citation.conferencePlaceSapporo Convention Center, Sapporo, Japan-
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