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Abrasive Size Effect On Glass CMP Using ZrO2 Based Slurry
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2021-08-02T22:51:24Z | - |
| dc.date.available | 2021-08-02T22:51:24Z | - |
| dc.date.issued | 2017-11-17 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/30061 | - |
| dc.title | Abrasive Size Effect On Glass CMP Using ZrO2 Based Slurry | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2017년도 한국재료학회 추계학술대회 | - |
| dc.citation.conferencePlace | 경주, 현대호텔 | - |
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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