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Multi-Density Structure of Al2O3 as a Moisture Permeation Barrier by Spatial Atomic Layer Deposition at Low Temperature
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-02T22:51:39Z | - |
| dc.date.available | 2021-08-02T22:51:39Z | - |
| dc.date.issued | 2017-11-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/30099 | - |
| dc.title | Multi-Density Structure of Al2O3 as a Moisture Permeation Barrier by Spatial Atomic Layer Deposition at Low Temperature | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2017학년도 한국재료학회 추계학술대회 | - |
| dc.citation.conferencePlace | 경주 현대호텔 | - |
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