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A New Nonlinear Parameter Estimation and Its Application to Critical Dimension Measurements in a Semiconductor Industry
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박철진 | - |
| dc.date.accessioned | 2021-08-03T04:27:37Z | - |
| dc.date.available | 2021-08-03T04:27:37Z | - |
| dc.date.issued | 2016-12-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/33877 | - |
| dc.title | A New Nonlinear Parameter Estimation and Its Application to Critical Dimension Measurements in a Semiconductor Industry | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 2nd Pacific Rim Statistical Conference for Production Engineering Production Engineering, Big Data & Statistics | - |
| dc.citation.conferencePlace | International Conference Room, Building 25-1, Seoul National University | - |
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Related Researcher
- Park, Chuljin
- COLLEGE OF ENGINEERING (DEPARTMENT OF INDUSTRIAL ENGINEERING)