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Deposition of VO2 thin film by using ALD with H2O reactant

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dc.contributor.author전형탁-
dc.date.accessioned2021-08-03T05:54:31Z-
dc.date.available2021-08-03T05:54:31Z-
dc.date.issued2016-10-26-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/34860-
dc.titleDeposition of VO2 thin film by using ALD with H2O reactant-
dc.typeConference-
dc.citation.conferenceNameISMP 2016-
dc.citation.conferencePlace서울 코엑스-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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