Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Particle deposition onto wafers in cleanroom airflow
- Authors
- 육세진
- Issue Date
- 8-Dec-2015
- Place
- Taipei, Taiwan
- Conference Name
- Cleanroom and Facility Conference (CFC 2015)
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)