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Remote Plasma ALD of Silicon Nitride for CTF
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T06:47:53Z | - |
| dc.date.available | 2021-08-03T06:47:53Z | - |
| dc.date.issued | 2015-12-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/37851 | - |
| dc.title | Remote Plasma ALD of Silicon Nitride for CTF | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2015 MRS FALL MEETING & EXHIBIT | - |
| dc.citation.conferencePlace | Boston, Massachusetts | - |
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