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Design and Development of a Hollow-Anode Discharge Source for Sputtering Process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정규선 | - |
| dc.date.accessioned | 2021-08-03T08:20:09Z | - |
| dc.date.available | 2021-08-03T08:20:09Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2014-12-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/41542 | - |
| dc.publisher | The Korean Physical Society | - |
| dc.title | Design and Development of a Hollow-Anode Discharge Source for Sputtering Process | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 정규선 | - |
| dc.identifier.bibliographicCitation | The 17th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.relation.isPartOf | The 17th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.citation.title | The 17th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.citation.conferencePlace | 제주도/대한민국 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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