Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Adsorption behavior of polymer layer onto ceria and its effect on dishing in STI CMP
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-03T08:33:20Z | - |
| dc.date.available | 2021-08-03T08:33:20Z | - |
| dc.date.issued | 2014-11-19 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/41825 | - |
| dc.title | Adsorption behavior of polymer layer onto ceria and its effect on dishing in STI CMP | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | International Conference on Planarization/CMP Technology 2014 | - |
| dc.citation.conferencePlace | Kobe, Japan | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)