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Poly(acrylic acid)-Poly(ethylene oxide) Complexation for Low Dishing in STI CMP
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-03T08:33:20Z | - |
| dc.date.available | 2021-08-03T08:33:20Z | - |
| dc.date.issued | 2014-11-19 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/41826 | - |
| dc.title | Poly(acrylic acid)-Poly(ethylene oxide) Complexation for Low Dishing in STI CMP | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | International Conference on Planarization/CMP Technology 2014 | - |
| dc.citation.conferencePlace | Kobe, Japan | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)