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The detection of the mass sensitivity for SiN surrounded doubly-clamped Si microbeam resonators

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dc.contributor.author이성재-
dc.date.accessioned2021-08-03T08:51:56Z-
dc.date.available2021-08-03T08:51:56Z-
dc.date.created2021-06-30-
dc.date.issued2014-10-23-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/42597-
dc.publisher한국물리학회-
dc.titleThe detection of the mass sensitivity for SiN surrounded doubly-clamped Si microbeam resonators-
dc.typeConference-
dc.contributor.affiliatedAuthor이성재-
dc.identifier.bibliographicCitation한국물리학회 가을학술논문대회-
dc.relation.isPartOf한국물리학회 가을학술논문대회-
dc.citation.title한국물리학회 가을학술논문대회-
dc.citation.conferencePlace광주-
dc.type.rimsCONF-
dc.description.journalClass2-
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서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers

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