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Prediction of the degree of particulate contamination of a heated or a cooled wafer in parallel airflow
- Authors
- 육세진
- Issue Date
- 14-Oct-2014
- Place
- COEX, Seoul, Korea
- Conference Name
- International Symposium on Contamination Control
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)