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실리콘 질화막 앵커로 감싸인 양단이 고정된 실리콘 빔 질량센서의 제작 및 특성
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이성재 | - |
| dc.date.accessioned | 2021-08-03T10:34:17Z | - |
| dc.date.available | 2021-08-03T10:34:17Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2014-04-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/44923 | - |
| dc.publisher | 마이크로 나노시스템 학회 | - |
| dc.title | 실리콘 질화막 앵커로 감싸인 양단이 고정된 실리콘 빔 질량센서의 제작 및 특성 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 이성재 | - |
| dc.identifier.bibliographicCitation | The 16th Korean MEMS conference | - |
| dc.relation.isPartOf | The 16th Korean MEMS conference | - |
| dc.citation.title | The 16th Korean MEMS conference | - |
| dc.citation.conferencePlace | 제주도 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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