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Thermal Chemical Vapor Deposition 법으로 성장된 MoS2 박막의 물리적 특성 분석
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김은규 | - |
| dc.date.accessioned | 2021-08-03T10:48:09Z | - |
| dc.date.available | 2021-08-03T10:48:09Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2014-02-12 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/45265 | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | Thermal Chemical Vapor Deposition 법으로 성장된 MoS2 박막의 물리적 특성 분석 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김은규 | - |
| dc.identifier.bibliographicCitation | 제46회 한국진공학회 | - |
| dc.relation.isPartOf | 제46회 한국진공학회 | - |
| dc.citation.title | 제46회 한국진공학회 | - |
| dc.citation.conferencePlace | 보광피닉스파크 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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