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Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Hang | - |
| dc.contributor.author | Sakamoto, Kei | - |
| dc.contributor.author | Inomata, Naoki | - |
| dc.contributor.author | Toda, Masaya | - |
| dc.contributor.author | Toan,Nguyen Van | - |
| dc.contributor.author | Song, Yun Heub | - |
| dc.contributor.author | Ono, Takahito | - |
| dc.date.accessioned | 2021-07-30T05:23:03Z | - |
| dc.date.available | 2021-07-30T05:23:03Z | - |
| dc.date.created | 2021-05-11 | - |
| dc.date.issued | 2019-06 | - |
| dc.identifier.issn | 2167-0013 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/4556 | - |
| dc.description.abstract | This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film TbxDy(1-x)Fe-y for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1200 ppm at magnetic field 9000 Oe. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
| dc.title | Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Song, Yun Heub | - |
| dc.identifier.doi | 10.1109/TRANSDUCERS.2019.8808489 | - |
| dc.identifier.scopusid | 2-s2.0-85071920837 | - |
| dc.identifier.wosid | 000539487000429 | - |
| dc.identifier.bibliographicCitation | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp.1698 - 1700 | - |
| dc.relation.isPartOf | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII | - |
| dc.citation.title | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII | - |
| dc.citation.startPage | 1698 | - |
| dc.citation.endPage | 1700 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Conference Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Instruments & Instrumentation | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
| dc.subject.keywordPlus | Actuators | - |
| dc.subject.keywordPlus | Electrodeposition | - |
| dc.subject.keywordPlus | Electrodes | - |
| dc.subject.keywordPlus | Magnetic actuators | - |
| dc.subject.keywordPlus | Magnetism | - |
| dc.subject.keywordPlus | Magnetostrictive devices | - |
| dc.subject.keywordPlus | Microsystems | - |
| dc.subject.keywordPlus | Bi-material cantilever | - |
| dc.subject.keywordPlus | Magnetic actuation | - |
| dc.subject.keywordPlus | Magnetostriction coefficient | - |
| dc.subject.keywordPlus | Magnetostrictive thin films | - |
| dc.subject.keywordPlus | Process Technologies | - |
| dc.subject.keywordPlus | TbxDy(1-x)Fey | - |
| dc.subject.keywordPlus | Terfenol-D | - |
| dc.subject.keywordPlus | Three electrode | - |
| dc.subject.keywordPlus | Solid-state sensors | - |
| dc.subject.keywordAuthor | Electrodeposition | - |
| dc.subject.keywordAuthor | TbxDy(1-x)Fey | - |
| dc.subject.keywordAuthor | Terfenol-D | - |
| dc.identifier.url | https://ieeexplore.ieee.org/document/8808489 | - |
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Related Researcher
- Song, Yun Heub
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)