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Radio Frequency Plasma Power Dependence on the Moisture Permeation Barrier Characteristics of Al2O3 Films Deposited by Remote Plasma Atomic Layer Deposition
- Authors
- 전형탁
- Issue Date
- 20130730
- Place
- san diego, California
- Conference Name
- ALD 2013
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)