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Plasma-Enhanced Atomic Layer Deposition of Yttria-Stabilized Zirconia

Authors
김영범
Issue Date
25-Jun-2013
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/47670
Place
Hawaii, USA
Conference Name
International Symposium on Green Manufacturing and Applications
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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