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Effect of Al2O3/ZrO2 Nanolaminate Deposited by Remote Plasma Atomic Layer Deposition for Moisture Barrier Properties
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T12:35:57Z | - |
| dc.date.available | 2021-08-03T12:35:57Z | - |
| dc.date.issued | 2013-05-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48070 | - |
| dc.title | Effect of Al2O3/ZrO2 Nanolaminate Deposited by Remote Plasma Atomic Layer Deposition for Moisture Barrier Properties | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 춘계학술발표대회 | - |
| dc.citation.conferencePlace | 여수 엠블호텔(THE MVL) | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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