Highly Dispersed Fe3+-Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization
DC Field | Value | Language |
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dc.contributor.author | Kim, Kijung | - |
dc.contributor.author | Seo, Jihoon | - |
dc.contributor.author | Lee, Myeongjae | - |
dc.contributor.author | Moon, Jinok | - |
dc.contributor.author | Lee, Kangchun | - |
dc.contributor.author | Yi, Dong Kee | - |
dc.contributor.author | Paik, Ungyu | - |
dc.date.accessioned | 2021-07-30T05:26:06Z | - |
dc.date.available | 2021-07-30T05:26:06Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2017 | - |
dc.identifier.issn | 2162-8769 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/4850 | - |
dc.description.abstract | Silica nanoparticles (NPs) are used as abrasives for tungsten chemical mechanical planarization (CMP) at acidic pH. However, the use of silica NPs at pH near their isoelectric point remains a problem because agglomeration due to low surface charge leads to defects on the tungsten surface during CMP. Herein, we report a simple strategy to increase the surface charge of silica NPs at acidic pH for defect-free tungsten CMP. The isomorphic substitution of Si4+ by Fe3+ ions on the surface of silica NPs by hydrothermal reaction led to a pH-independent permanent negative surface charge, which increased as the concentration of substituted Fe3+ ions increased. At acidic pH, the increased negative surface charge of Fe3+-substituted silica (Fe-silica) NPs resulted in a reduction in the number of agglomerated large particles relative to that of pure silica NPs. As a result, highly negatively-charged Fe-silica NPs showed high performance in the reduction of defect count on the tungsten surface after CMP. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.title | Highly Dispersed Fe3+-Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Paik, Ungyu | - |
dc.identifier.doi | 10.1149/2.0171707jss | - |
dc.identifier.scopusid | 2-s2.0-85021817573 | - |
dc.identifier.wosid | 000409164900020 | - |
dc.identifier.bibliographicCitation | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.6, no.7, pp.P405 - P409 | - |
dc.relation.isPartOf | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | - |
dc.citation.title | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | - |
dc.citation.volume | 6 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | P405 | - |
dc.citation.endPage | P409 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | RESONANCE RAMAN-SPECTROSCOPY | - |
dc.subject.keywordPlus | PARTICLE-SIZE | - |
dc.subject.keywordPlus | CHARGE-DENSITY | - |
dc.subject.keywordPlus | ADSORPTION | - |
dc.subject.keywordPlus | IRON | - |
dc.subject.keywordPlus | SLURRIES | - |
dc.subject.keywordPlus | STABILITY | - |
dc.subject.keywordPlus | FRAMEWORK | - |
dc.subject.keywordPlus | ZEOLITES | - |
dc.subject.keywordPlus | BEHAVIOR | - |
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