Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Study of Slurry pH and oxidizer on Ge-doped SbTe film in PRAM CMP
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2021-08-03T13:47:59Z | - |
| dc.date.available | 2021-08-03T13:47:59Z | - |
| dc.date.issued | 2012-11-08 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/49713 | - |
| dc.title | Study of Slurry pH and oxidizer on Ge-doped SbTe film in PRAM CMP | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국재료학회 2012년도 추계학술대회 | - |
| dc.citation.conferencePlace | 라카이 샌드파인 리조트 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.