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수직 기류에서 포토마스크 표면으로의 입자침착속도에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 육세진 | - |
| dc.date.accessioned | 2021-08-03T13:48:10Z | - |
| dc.date.available | 2021-08-03T13:48:10Z | - |
| dc.date.issued | 2012-11-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/49732 | - |
| dc.title | 수직 기류에서 포토마스크 표면으로의 입자침착속도에 관한 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2012년도 클린룸과 오염제어기술 심포지움 | - |
| dc.citation.conferencePlace | 과학기술회관 | - |
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)