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Corrosion Inhibition Effect of Organic Additive on Ru Film in Colloidal Silica Based Slurry with Sodium Periodate

Authors
박재근
Issue Date
10-Oct-2012
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/50438
Place
Hawaii Convention Center and the Hilton Hawaiian Village
Conference Name
222nd ECS Meeting
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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