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Nanoscale Fluoropolymer Pattern Fabrication by Capillary Force Lithography for Selective Deposition of Copper

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dc.contributor.author성명모-
dc.date.accessioned2021-08-03T14:34:45Z-
dc.date.available2021-08-03T14:34:45Z-
dc.date.created2021-06-30-
dc.date.issued2012-08-21-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/50909-
dc.publisher한국진공학회-
dc.titleNanoscale Fluoropolymer Pattern Fabrication by Capillary Force Lithography for Selective Deposition of Copper-
dc.typeConference-
dc.contributor.affiliatedAuthor성명모-
dc.identifier.bibliographicCitation제43회 한국진공학회-
dc.relation.isPartOf제43회 한국진공학회-
dc.citation.title제43회 한국진공학회-
dc.citation.conferencePlace라마다 프라자 제주호텔-
dc.type.rimsCONF-
dc.description.journalClass2-
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서울 자연과학대학 > 서울 화학과 > 2. Conference Papers

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