Effect of N2 plasma treatment on Al2O3 on the flatband voltage shift
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2021-08-03T14:35:53Z | - |
dc.date.available | 2021-08-03T14:35:53Z | - |
dc.date.issued | 20120816 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/51027 | - |
dc.title | Effect of N2 plasma treatment on Al2O3 on the flatband voltage shift | - |
dc.type | Conference | - |
dc.citation.conferenceName | NANO KOREA 2012 | - |
dc.citation.conferencePlace | 코엑스 | - |
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