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Comparative Study of CMP Performance between Ge2Sb2Te5 and Ge1Sb7Te2 film for High Speed Phase Change Memory
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2021-08-03T14:48:54Z | - |
| dc.date.available | 2021-08-03T14:48:54Z | - |
| dc.date.issued | 2012-06-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/51292 | - |
| dc.title | Comparative Study of CMP Performance between Ge2Sb2Te5 and Ge1Sb7Te2 film for High Speed Phase Change Memory | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국전기전자재료학회 창립 제25주년 기념 하계학술대회 | - |
| dc.citation.conferencePlace | 라카이 샌드파인 리조트 | - |
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