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Atomic layer depostion of tin sulfides using tetrakis(dimethylamino) tin and hydrogen sulfide
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T14:49:39Z | - |
| dc.date.available | 2021-08-03T14:49:39Z | - |
| dc.date.issued | 2012-06-19 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/51364 | - |
| dc.title | Atomic layer depostion of tin sulfides using tetrakis(dimethylamino) tin and hydrogen sulfide | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ALD 2012 | - |
| dc.citation.conferencePlace | 미국 | - |
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