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Study of chelating agent on chemical mechanical polishing performance for Ge2Sb2Te5 film
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2021-08-03T15:19:43Z | - |
| dc.date.available | 2021-08-03T15:19:43Z | - |
| dc.date.issued | 2012-05-17 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/51897 | - |
| dc.title | Study of chelating agent on chemical mechanical polishing performance for Ge2Sb2Te5 film | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2012 50th Technical Meeting of Korea CMPUGM | - |
| dc.citation.conferencePlace | 성균관대학교 | - |
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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