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Design of Extremely Proximity Gettering using MeV-nitrogen Ion Implantation for Si C-MOS Image Sensor

Authors
박재근
Issue Date
10-May-2012
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/51993
Place
Sheraton Seattle Hotel, Seattle, USA
Conference Name
2012 SiWEDS Spring Meeting
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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